This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.

This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.

Seeking renewable and clean energies is essential for releasing the heavy reliance on mineral-based energy and remedying the threat of global warming to our environment. In the last decade, explosive growth in research and development efforts devoted to microelectromechanical systems (MEMS) technology and nanowires-related nanotechnology have paved a great foundation for new mechanisms of harvesting mechanical energy at the micro/nano-meter scale. MEMS-based inertial sensors have been the enabler for numerous applications associated with smart phones, tablets, and mobile electronics. This is a valuable reference for all those faced with the challenging problems created by the ever-increasing interest in MEMS and nanotechnology-based energy harvesters and their applications. This book presents fundamental physics, theoretical design, and method of modeling for four mainstream energy harvesting mechanisms -- piezoelectric, electromagnetic, electrostatic, and triboelectric. Readers are provided with a comprehensive technical review and historical view of each mechanism.The authors also present current challenges in energy harvesting technology, technical reviews, design requirements, case studies, along with unique and representative examples of energy harvester applications. Market Researchers in energy harvesting techniques; Engineers working on device design; Academics and students.